A MEMS Silicon-based Piezoelectric AC Current Sensor

A Self-powered Mems Sensor for Ac Electric Current

A new type of MEMS sensor has been developed for measuring AC electric current. The sensor is comprised of a piezoelectric aluminum nitride MEMS cantilever with a microscale composite permanent magnet mounted to its free end. When placed in proximity to a wire carrying AC current, the alternating magnetic field surrounding the wire induces a sinusoidal force on the sensor magnet, deflecting the...

Silicon microsurgery-force sensor based on diffractive optical MEMS encoders

This paper presents a micrograting-based force sensor integrated with a surface micromachined silicon-nitride probe suitable for characterizing microsurgery force on a single cell or embryo. The probe is supported by springs of a known spring constant, and the surgical penetration force is determined from displacement measurements. The opticalencoder force sensor exhibits conŽgurable sensitivit...

Two-Port Piezoelectric Silicon Carbide MEMS Cantilever Resonator

A two-port silicon carbide single-clamped beam (cantilever) microelectromechanical system (MEMS) resonant device actuated piezoelectrically and sensed piezoelectrically has been designed, fabricated and tested. Lead zirconium titanate (PZT) has been used as active material to implement the piezoelectric actuator and sensor. Piezoelectric electrodes have been placed on the top of the single 3C-S...

A Miniature Magnetic-Force-Based Three-Axis AC Magnetic Sensor with Piezoelectric/Vibrational Energy-Harvesting Functions

In this paper, we demonstrate a miniature magnetic-force-based, three-axis, AC magnetic sensor with piezoelectric/vibrational energy-harvesting functions. For magnetic sensing, the sensor employs a magnetic-mechanical-piezoelectric configuration (which uses magnetic force and torque, a compact, single, mechanical mechanism, and the piezoelectric effect) to convert x-axis and y-axis in-plane and...

Development of MEMS-Based Piezoelectric Microvalve Technologies